- Home
- » Products
- » AFM Probes
- » CDR70-EBD
CDR70-EBD Specification Sheet
AFM Probe Type: CDR70-EBD
-
Call us: + 49 (0) 6441 870 6272 Wetzlar, Germany
- + 49 (0) 6 441 870 6 272
- + 49 (0) 6 441 870 6 274
- info@nanoandmore.com
- close
on manufacturer's website
Order this product
Print spec sheetProduct Description:
CDR70-EBD - Critical Dimension Re-entrant AFM Probe 50nm total Width
The nanotools®CDR70-EBD probes are for measuring side wall roughness, slope angle, trench depths, and step height. It brings EBD´s key strength: precise tip orientation, precise control in tip dimensions (length, total diameter, vertical edge height, overhang) and large volume production to undercut applications. These tips do not have a wear resistance coating - but made from bulk wear resistance diamond like carbon.
The high aspect ratio part of the probe is made from HIGH-DENSITY, DIAMOND LIKE CARBON (HDC/DLC).
• high aspect ratio• hydrophobic surface properties
• high stiffness/elastic modulus (8 x of that of silicon)
• low thermal mass
• abrasion resistance
tip spec:
shape: CD re-entrant
length: 300 nm +/-50 nm
diameter: 55-70 nm
tilt compensation: 3 deg +/- 0.5 deg
VEH *: < 15 nm
LH **: 5-10 nm
*vertical edge height
**lateral height (overhang)
Our HDC dissipates static charge. This leads to probes offering the extreme durability of diamond together with high resolution imaging capability. Applying our patented EBD techninque we ensure a stiff and rigid high aspect ratio probe of superior symmetry and nanometer precision.
Application Modes:
AFM Probe Specifications:
AFM Cantilever(s):
| cant. | shape | length | width | thickness | force const. | res. freq. | probe base |
|---|---|---|---|---|---|---|---|
| beam | 160 µm (155 - 165 µm)* | 45 µm (40 - 50 µm)* | 4.6 µm (4.1 - 5.1 µm)* | 42 N/m (27 - 80 N/m)* | 285 kHz (240 - 380 kHz)* | ||
AFM Tips:
| cant. | shape | tip height | tip set back | tip radius | full cone angle | half cone angle | |
|---|---|---|---|---|---|---|---|
| High-Aspect-Ratio, Arrow , Cylindrical, EBD |
0.3 µm (0.25 - 0.35 µm)* | 0.25 - 0.35 µm* | 0 µm (0 - 0 µm)* |
* typical range
Coating:
Aluminum reflective coating on the detector side of the cantilever. The Al Reflective coating increases the laser signal by a factor of about 2.5. In particular it is recommended for highly reflective samples and machine vision applications.Probes Datasheets:
Included.Purchasing Information
Product Availability:
On stock
Price Description:
Does not include VAT or customs duties.
Payment within 30 days from date of invoice, no discount. Payment free of bank chargesTerms & Conditions:
Order:
| Order Code | Probes per Set | price, EUR | Quantity |
|---|---|---|---|
| CDR70-EBD-5 | 5 pcs | 3500.00 |
|
| CDR70-EBD-25 | 25 pcs | 15750.00 |
|
DANGER!
One tiny amount of static electricity while you are handling these probes will destroy the tip!
We highly recommend that you utilize an ESD station and if you do not already have one, we have a mobile ESD station for only 70 EUR.
Considering the costs of these probes, this is a very wise investment.