Product Description:

Metrology Probe M1

Multipurpose probe with excellent lifetime and reliability for high aspect ratio and high resolution applications. The nanotools®M1_NCH_13 tip is designed for non-contact/high frequency mode, in particular for automated AFM systems for in-line process control as well as general purpose AFM.

The high aspect ratio part of the probe is made from HIGH-DENSITY, DIAMOND LIKE CARBON (HDC/DLC), thus offering the extreme durability of diamond together with high resolution imaging capability. The stiffness/Youngs modulus is 8 x of that of silicon. Applying our patented EBD (electron beam deposition) technique we ensure a stiff and rigid high aspect ratio probe of superior symmetry and nanometer precision.

A 100 % quality check by SEM for every tip, high scan speeds, flexibility in combination with stiffness, 13 deg tilt compensation and optimized cost per scan are key parameters. The M1_NCH_13 is used by leading fabs worldwide for several AFM in-line monitoring tasks such as depth control or STI.