AR5T-NCHR datasheet
AFM Probe Type: AR5T-NCHR
Product Description:
NANOSENSORS™ AR5T-NCHR sensors are designed for non-contact mode or Tapping Mode AFM (also known as: attractive or dynamic mode). This sensor type combines high operation stability with outstanding sensitivity and fast scanning ability.
For measurements on samples with sidewall angles approaching 90° NANOSENSORS™ produces specially tailored tips. These tips are FIB (Focused Ion Beam) milled to achieve a high aspect ratio portion at the end of the common silicon tip. This subtractive method of producing the high aspect ratio needle offers the advantage of high lateral stiffness and rigidity of the tip.
On the model AR5T the last 2 µm of the tip are tilted 13° to the center axis of the cantilever. With this feature the tilt angle of the cantilever caused by the mount of the AFM head (commonly 13°) will be compensated. Now, nearly vertical sidewalls can be measured offering a symmetrical scan.
For measurements on samples with sidewall angles approaching 90° NANOSENSORS™ produces specially tailored tips. These tips are FIB (Focused Ion Beam) milled to achieve a high aspect ratio portion at the end of the common silicon tip. This subtractive method of producing the high aspect ratio needle offers the advantage of high lateral stiffness and rigidity of the tip.
On the model AR5T the last 2 µm of the tip are tilted 13° to the center axis of the cantilever. With this feature the tilt angle of the cantilever caused by the mount of the AFM head (commonly 13°) will be compensated. Now, nearly vertical sidewalls can be measured offering a symmetrical scan.
The probe offers unique features:
- length of the high aspect ratio portion of the tip > 2 µm
- typical aspect ratio at 2 µm in the order of 7:1 (when viewed from side as well as along
cantilever axis)
- high aspect ratio portion of the tip tilted 13° to the center axis of the cantilever
- excellent tip radius of curvature
- highly doped to dissipate static charge
- high mechanical Q-factor for high sensitivity
Application Modes:
AFM Probe Specifications:
AFM Cantilevers:
| Cant. | Length | Width | Thickness | Force Const. | Res. Freq. |
|---|---|---|---|---|---|
| 1 | 125 µm(115 - 135 µm)* | 30 µm(22.5 - 37.5 µm)* | 4 µm(3 - 5 µm)* | 42 N/m(10 - 130 N/m)* | 330 kHz(204 - 497 kHz)* |
AFM Tips:
| on Cant. | Shape | Tip Radius | Half Cone Angles |
|---|---|---|---|
| 1 | High-Aspect-Ratio | <15 nm guaranteed | typically < 5° at 2 µm of the high aspect ratio portion |
* - guaranteed range
Coating:
The reflex coating is a 30 nm thick aluminum coating on the detector side of the cantilever which enhances the reflectivity of the laser beam by a factor of about 2.5. Furthermore it prevents light from interfering within the cantilever. The virtually stress-free coating is bending the cantilever less than 2% of the cantilever length.
Sensors Datasheets:
Datasheet for all AFM probes with sets of 10 or 20 probes.
Datasheet for up to 32 probes with full wafer.
Purchasing Info:
Product Availability: |
From stock |
Price Description: |
No taxes applied except 5% in South Carolina. |
