AFM Probe Type: EBD2-100_NCHR_3

Product Description:

Multipurpose High Aspect Ratio and High Resolution EBD probe

The nanotools® EBD3D2-100A tip is designed for non-contact / high frequency mode, in particular for automated AFM systems for in-line process control and general purpose AFM. Excellent lifetime and reliability are key features. The EBD3D2-100A is a perfect choice for deep trench measurements as well as getting detailed information about step height. This probe offers an Aluminum coating on the backside of the holder chip.

- shape:                     conical, rotation-symmetric
- length:                    2000-2600 nm
- diameter:                80-100 nm
- tip radius:               < 10 nm, typically 5 nm
- tilt compensation:   3 deg +/- 1 deg

Applying our patented EBD techninque we ensure a stiff and rigid high aspect ratio probe of superior symmetry and nanometer precision.

EBD Material

The high aspect ratio part of the probe is made from HIGH-DENSITY, DIAMOND LIKE CARBON (HDC/DLC). The tips show superior properties:

• high aspect ratio
• hydrophobic surface properties
• high stiffness/elastic modulus (8x of that of silicon)
• low thermal mass
• abrasion resistance

Our HDC dissipates static charge. This leads to probes offering the extreme durability of diamond together with high resolution imaging capability. Applying our patented EBD technique we ensure a stiff and rigid high aspect ratio probe of superior symmetry and nanometer precision.

This product features alignment grooves on the backside of the holder chip.

Application Modes:

• Enhanced Wear Resistance Non-Conductive
• Trench / High Aspect Measurement AFM Tips
• Non-Contact / Tapping Mode AFM Probes