AFM Probe Type: M1_NCH_13

Product Description:

Metrology Probe M1

Multipurpose probe with excellent lifetime and reliability for high aspect ratio and high resolution applications. The nanotools® M1_NCH_13 tip is designed for non-contact/high frequency mode, in particular for automated AFM systems for in-line process control as well as general purpose AFM.

The high aspect ratio part of the probe is made from HIGH-DENSITY, DIAMOND LIKE CARBON (HDC/DLC), thus offering the extreme durability of diamond together with high resolution imaging capability. The stiffness/Youngs modulus is 8 x of that of silicon. Applying our patented EBD (electron beam deposition) technique we ensure a stiff and rigid high aspect ratio probe of superior symmetry and nanometer precision.

A 100 % quality check by SEM for every tip, high scan speeds, flexibility in combination with stiffness, 13 deg tilt compensation and optimized cost per scan are key parameters. The M1_NCH_13 is used by leading fabs worldwide for several AFM in-line monitoring tasks such as depth control or STI.

- EBD tip on NCH/TESP AFM cantilever
- tilt compensation: 13 deg +/-1 deg 
- length of the high aspect ratio spike: 800 nm
- diameter  at 600 nm tip length:  75 nm
- tip shape: conical, rotation-symmetric
- tip radius: better 10 nm, typically 5 nm
- 100 % SEM check; good tip guarantee.
- high mechanical Q-factor for high sensitivity.
- high lifetime substitute for silicon FIB probes.

This product features alignment grooves on the backside of the holder chip.

Application Modes:

• Enhanced Wear Resistance Non-Conductive
• Trench / High Aspect Measurement AFM Tips
• Non-Contact / Tapping Mode AFM Probes