Product Description:

Metrology Probe MSS SuperSharp

SuperSharp, high aspect ratio probe for very fine features such as divots, 10 nm holes etc.

Multipurpose high resolution probe with excellent lifetime and reliability. The nanotools® MSS_NCHR_3 tip is designed for non-contact/high frequency mode. It delivers outstanding resolution in critical AFM applications even on hard, tip eating samples like ceramics, silicon oxide/nitride, polysilicon to name a few.

The high aspect ratio part of the probe is made from HIGH-DENSITY, DIAMOND LIKE CARBON (HDC/DLC), thus offering the extreme durability of diamond together with high resolution imaging capability. The stiffness/Youngs modulus is 8 x of that of silicon. Applying our patented EBD (electron beam deposition) technique we ensure a stiff and rigid high aspect ratio probe of superior symmetry and nanometer precision.

A 100 % quality check by SEM for every tip, high scan speeds, flexibility in combination with stiffness, 3 deg tilt compensation and optimized cost per scan are key parameters.

- EBD tip on pointprobe NCHR/TESPA AFM cantilever
- tilt compensation: 3 deg +/- 0.5 deg
- length of the high aspect ratio spike: 300 nm
- diameter at 300 nm tip length: 40 nm (1:8 aspect ratio)
- tip shape: conical, rotation-symmetric
- excellent tip radius: < 5 nm, typically 2-3 nm
- 100 % SEM check; good tip guarantee.
- high mechanical Q-factor for high sensitivity.
- fits into automated AFM tools (in fab/in line)

This product features alignment grooves on the backside of the holder chip.

Application Modes:

• Enhanced Resolution Imaging AFM Tips (Super Sharp Silicon, SSS Tips)
• Enhanced Wear Resistance Non-Conductive
• Trench / High Aspect Measurement AFM Tips
• Non-Contact / Tapping Mode AFM Probes