AFM Probes » M1-HAR

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Quantity
NT_M1_v0010-5 Box of 5 AFM Probes
$1 450.00
esd kit

ESD Kit recommended with this product. Click here to order: ESD Kit

M1-HAR

High-aspect ratio, tilt compensated EBD AFM whisker for automated non-contact AFM

Coating: None
Tip shape: High-Aspect-Ratio, Cone Shaped, EBD
Cantilever:
F 320 kHz
C 40 N/m
L 120 µm
*nominal values
The SEMI standard for trench measurements: robust, diamond-like EBD whisker with an aspect ratio > 9 and 13° tilt compensation. For automated non-contact AFM.
Uncoated

Whisker(s):

  • HDC
  • 800 nm (600 - 1000 nm)*
  • 70 nm (60 - 80 nm)* at tip depth: 600 nm
  • <3°
  • >9*
  • <5 nm (<10 nm)*
  • 13° (±1°)*
  • * guaranteed

    AFM Tip:

  • AFM Cantilever:

  • Beam
  • 120 µm (115 - 125 µm)**
  • 30 µm (28 - 32 µm)**
  • 4.4 µm (3.9 - 4.9 µm)**
  • 40 N/m (20 - 60 N/m)**
  • 320 kHz (270 - 370 kHz)**
  • ** guaranteed range

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