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MikroMasch HQ Line Test Structures: TGXYZ Calibration Series

MikroMasch HQ Line product screencast on test structures TGXYZ calibration series presented by Dr. Penka Terziyska, Product manager
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AFM probes / AFM calibration gratings related to this screencast:

  • TGXYZ01
    XYZ Calibration Grating, 20nm Step Height, 5µm and 10µm Pitch
  • TGXYZ02
    XYZ Calibration Grating, 100nm Step Height, 5µm and 10µm Pitch
  • TGXYZ03
    XYZ Calibration Grating, 500nm Step Height, 5µm and 10µm Pitch
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