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KPFM & EFM Sample
Sample with Al and Au line arrays for KPFM and EFM tests
Product Description
Sample for KPFM and EFM tests featuring:
arrays with alternating Al and Au lines deposited on an oxide covered silicon substrate
line array pitches of 4, 8, 20 and 40 micrometers
line height of approx. 35 nanometers
chip mounted on a 15 millimeter glass disc - metal disc stack
thin silver plated copper wires connected to the Al and Au contact pads
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