KPFM & EFM Sample
Sample with Al and Au Line Arrays for KPFM and EFM Tests
Sample for KPFM and EFM tests featuring:
- arrays with alternating Al and Au lines deposited on an oxide covered silicon substrate
- line array pitches of 8, 20 and 40 micrometers
- line height of approx. 35 nanometers
- chip mounted on a 15 millimeter glass disc - metal disc stack
- thin copper wires connected to the Al and Au contact pads
Please do not exceed 3V bias between the gold and aluminum regions! We also recommend using a current limiter <10mA to avoid possible damage to the thin conductive films due to contamination-enhanced leakage paths.
Click here for a pdf file with KPFM & EFM Sample schematics.