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IFSR

AFM Probe Tip Characterizer: Line with Sharp, Overhanging Edges

Product Description

Layout:
88 cells on 1 x 1 mm area on 6 x 6 silicon chip


Specifications:


- Material: Silicon
- Width of line: 2 to 2.5 µm
- Depth of line: > 4 µm
- Overhang: > 250 nm
- Overhang slope angle: 35°
- Top corner radius: < 10 nm
- Edge roughness: < 10 nm

Special layout makes it easy, to return with a tip always to the identical characterizer position. Many identical sites on a single characterizer chip help to increase lifetime.
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