The flatness standard consists of a superflat plane and is intended to be used to analyze and correct the scanner bow of the piezo-scanner used in most Scanning Force Microscopes. The standard consists of a quartz substrate with a chromium layer.
The active area is located in the center of the chip and is surrounded by the FindMe structure.
This standard has been developed in close cooperation with the German national authority of standards: PTB (Physikalisch Technische Bundesanstalt). Due to this PTB is able to certify this standard in accordance with international guidelines. Please contact Working Group 5.25 Scanning Probe Metrology at www.ptb.de directly.